Chemical vapor deposition of Pd/Cu alloy films from a new single source precursor
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چکیده
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High vacuum chemical vapor deposition of cubic SiC thin ž / films on Si 001 substrates using single source precursor
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ژورنال
عنوان ژورنال: Journal of Crystal Growth
سال: 2015
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2014.09.032